Micro-manufacturing Technology Using DUV Laser and NC

Abstract

Combining deep UV laser with NC technology, complex 3D structures can be generated. For fused silica, the ablation depth and surface roughness are investigated after 157nm laser processing. Under laser fluence of ~4J/cm² and spot size of ~35μm, the ablation rate of fused silica is about 75nm/pulse for 157nm laser. A better ablation quality could be achieved under the repetition rate of ~10Hz. Assisted by numerical control, three-dimensional micro-structures are fabricated using 157nm laser technique.