Xu, Gang, Yutang Dai, and Jianlei Cui. “Micro-Manufacturing Technology Using DUV Laser and NC”. Advances in Systems Science and Applications 11, no. 3-4 (September 20, 2011): 270-279. Accessed May 8, 2024. https://ijassa.ipu.ru/index.php/ijassa/article/view/319.